Published in
American Institute of Physics, AIP Advances, 1(5), p. 017115, 2015
DOI: 10.1063/1.4905887
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Vacuum ultraviolet photochemical selective area atomic layer deposition of Al2O3 dielectrics
Journal article published in 2015 by
P. R. Chalker,
P. A. Marshall,
K. Dawson 
,
I. F. Brunell,
C. J. Sutcliffe,
R. J. Potter
,
I. F. Brunell,
C. J. Sutcliffe,
R. J. Potter
This paper is made freely available by the publisher.
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