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IOP Publishing, Japanese Journal of Applied Physics, 4S(52), p. 04CH09, 2013

DOI: 10.7567/jjap.52.04ch09

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Growth of (111) One-Axis-Oriented Bi(Mg1/2Ti1/2)O3Films on (100)Si Substrates

This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Abstract

Films of a high-pressure perovskite phase, Bi(Mg1/2Ti1/2)O3, were prepared on (111)c-oriented SuRuO3-coated (111)Pt/TiO2/SiO2/(100)Si substrates. The perovskite Bi(Mg1/2Ti1/2)O3 films had a (111) one-axis orientation, because their constituent grains were epitaxially grown on (111)c-oriented perovskite SrRuO3 ones. The remanent polarization and piezoelectric constant measured at an applied electric field of 600 kV/cm were about 30 µC/cm2 and 40 pm/V, respectively. A remarkable phase transition was not observed from room temperature to 350 °C in a (111) one-axis-oriented Bi(Mg1/2Ti1/2)O3 film, suggesting that the Curie temperature of this film is above 350 °C.