Institute of Electrical and Electronics Engineers, IEEE Electron Device Letters, 7(33), p. 1078-1080, 2012
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A polydimethylsiloxane (PDMS)-coated nanoelectromechanical systems diaphragm embedded with silicon nanowires (SiNWs) is proposed for chloroform vapor detection at room temperature. The PDMS film swells and leads to the deformation of micro-diaphragm when it is exposed to vapor. The SiNWs are connected in a Wheatstone bridge which is used to transform the deformation into a measurable output voltage. This sensor provides good linearity, sensitivity, and repeatability. The sensitivity of our sensor for chloroform vapor detection is 1.41 $μ\hbox{V/V/ppm}$, while the power consumption is as low as 2 $μ\hbox{W}$.