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Silicon Photonics and Photonic Integrated Circuits III

DOI: 10.1117/12.921695

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High quality factor dielectric multilayer structures fabricated by rf-sputtering

Journal article published in 2012 by Alessandro Chiasera ORCID, Sreeramulu Valligatla, Stefano Varas, Nicola Bazzanella ORCID, D. Narayana Rao, Giancarlo C. Righini, Maurizio Ferrari ORCID
This paper is available in a repository.
This paper is available in a repository.

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