Published in
Elsevier, Sensors and Actuators B: Chemical, (111-112), p. 135-139
DOI: 10.1016/j.snb.2005.06.048
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A very sensitive porous silicon based humidity sensor
Journal article published in 2005 by
G. Di Francia,
A. Castaldo,
E. Massera,
I. Nasti,
L. Quercia,
I. Rea 
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Abstract
A relative humidity (RH) sensor device based on n-type porous silicon has been designed, fabricated and characterized. The simple device is a diode reverse dc biased, exhibiting an extremely high sensitivity in ambient air and a large operating range (30–70% RH). Aging and NO2 interference on the sensor performance have been also investigated.