The heaviest elements are synthesized in heavy-ion induced hot fusion reactions with various actinide targets. Because the actinide material is often available only in very limited amounts, a deposition method with high yields (~90 %) is needed. We report on the production of 244Pu, 243Am, 248Cm, 249Bk, and 249Cf targets on thin Ti backings by molecular plating. Different chemical purification steps using ion chromatographic techniques were applied for the purification of 249Cf and 244Pu. The deposition procedure applied for the production of ~0.4–0.8 mg/cm2 thick targets is described. The deposition yield was determined either by α-particle or γ-ray spectroscopy. Furthermore, neutron activation analysis has been applied in the case of 244Pu, 243Am, and 248Cm. Information about the spatial distribution and homogeneity of the target layer was obtained by radiographic imaging.