Published in

2008 IEEE Sensors

DOI: 10.1109/icsens.2008.4716373

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Interdigitated sensorial system on flexible substrate

This paper is available in a repository.
This paper is available in a repository.

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Abstract

In this paper we present the design and fabrication of two flexible sensor devices: humidity sensor and ammonia sensor integrated with electronic circuit interface on thin flexible substrate (8 mum). The transducers layout has been optimized by means of numerical simulations. A thin layer of Bisbenzocyclobytene (BCB) is used as dielectric sensitive material in humidity sensor. Conversely a mixed polymer layer based on polyaniline emeraldine base (PANi-EB) is used as sensing conductive polymer for ammonia.