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IOP Publishing, Journal of Physics: Conference Series, (514), p. 012008, 2014

DOI: 10.1088/1742-6596/514/1/012008

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Study of sol-gel Cu-doped Al2O3 thin films: Structural and optical properties

Journal article published in 2014 by T. Ivanova, A. Harizanova, T. Koutzarova, Bénédicte Vertruyen ORCID
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Abstract

We present a study of of copper-doped Al2O3 films prepared by sol-gel deposition. The films were spin-coated on Si and quartz substrates and a high-temperature treatment was conducted in the range 500-800 °C in oxygen or nitrogen. The impact was followed of the annealing procedures on the AlxCu1-xO3 films's properties. XRD was used to determine the films' structure; it revealed a mixture of amorphous and crystalline phases. Optical characterization was performed by UV-VIS spectroscopy. The sol-gel films prepared are very transparent. The band gaps of the Al-Cu-O films were estimated from the optical data, with the values ranging from 3.4 to 4.8 eV depending on the Cu content, the annealing and the gas ambients. ; Peer reviewed