Polymer-like organic thin films obtained by plasma techniques are of wide interest for various applications. Polythiophene-like thin films were deposited by plasma polymerization in a parallel plate radiofrequency reactor starting from thiophene vapors. The optical properties of the films were obtained from spectroscopic ellipsometry, in the 250-1250 nm range. The calculated band gap is in agreement with a polythiophene-like material consisting of cross-linking of oligomers. The presence of functional groups and film stability against oxidation is analyzed by FTIR spectrometry. The monitoring of functional groups incorporation during the film deposition was done by analyzing the integral intensities of specific absorption bands and led to the conclusion that homogeneous films are obtained whatever the process duration.