1996 International Semiconductor Conference. 19th Edition. CAS'96 Proceedings
DOI: 10.1109/smicnd.1996.557426
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Cathodoluminescence in the scanning electron microscope is used to investigate growth and process induced defects in GaSb crystals. In particular, luminescence emission has been used to study the nature of acceptor defects present after different annealing and irradiation treatments