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Elsevier, Sensors and Actuators B: Chemical, 1-3(91), p. 303-308

DOI: 10.1016/s0925-4005(03)00091-1

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Comparison of layered based SAW sensors

This paper is available in a repository.
This paper is available in a repository.

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Abstract

A comprehensive investigation of layered surface acoustic wave (SAW) devices is presented. These types of SAW devices have a remarkable performance for gas and liquid sensing applications as confinement of energy in the layers generally increases their sensitivity. Different modes of wave propagations and the effect of the guiding layer thickness and material on the layered devices are discussed in this paper.