Published in

Elsevier, Journal of Crystal Growth, 3-4(240), p. 373-381, 2002

DOI: 10.1016/s0022-0248(02)00940-5

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Compositional variation in Si-rich SiGe single crystals grown by multi-component zone melting method using Si seed and source crystals

This paper is available in a repository.
This paper is available in a repository.

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Abstract

The effect of the supply of depleted Si solute elements on the compositional variation in the Si-rich SiGe bulk crystals was studied using the method which was used to grow Ge-rich SiGe single crystals with a uniform composition. By selecting the proper pulling rate, we can obtain Si-rich Si1−xGex bulk crystals with uniform composition of x=0.1 without using the supply mechanism of depleted Si solute elements. When the supply mechanism of Si solute elements was used, the initial composition in Si-rich SiGe crystals can be much more easily determined by controlling the growth temperature than that in Ge-rich crystals because the Si seed crystal is not melted down. The supply of Si solute elements is very effective to change the compositional variation even for Si-rich SiGe crystals.