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American Chemical Society, Chemistry of Materials, 17(27), p. 6091-6096, 2015

DOI: 10.1021/acs.chemmater.5b02608

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Parallel Arrays of Sub-10 nm Aligned Germanium Nanofins from an In Situ Metal Oxide Hardmask using Directed Self-Assembly of Block Copolymers

Journal article published in 2015 by Cian Cummins ORCID, Anushka Gangnaik, Roisin A. Kelly, Alan J. Hydes, John O'Connell, Nikolay Petkov, Yordan M. Georgiev, Dipu Borah, Justin D. Holmes, Michael A. Morris
This paper is available in a repository.
This paper is available in a repository.

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