A cavity-hollow cathode, consisting of two specifically formed disks of Ti with an additional cavity intended for enhancement of the pendulum effect of the electrons, was in-vestigated as a low-cost sputtering source. A discharge in Ar gas was produced inside the hol-low cathode. Measurements using Langmuir probes yielded evidence for the formation of a space charge double layer in front of the cathode. The sputtered atoms form negatively charged clusters, which bombard the film substrate. Titanium thin films were produced on highly oriented pyrolytic graphite. Film morphology and elemental composition were investi-gated by scanning tunnel microscopy (STM) and X-ray photoelectron spectroscopy (XPS).