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Elsevier, Sensors and Actuators B: Chemical, 1-3(78), p. 279-284

DOI: 10.1016/s0925-4005(01)00826-7

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New technology for multi-sensor silicon needles for biomedical applications

Journal article published in 2001 by A. Errachid, A. Ivorra ORCID, J. Aguiló, R. Villa, N. Zine, J. Bausells
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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Abstract

A multi-sensor silicon needle including two ion-sensitive field effect transistor (ISFET) sensors, a platinum pseudo-reference electrode (Pt) and a temperature sensor has been fabricated by using a CMOS-compatible technology and silicon micromachining. This paper presents a summary of the fabrication process and results of the device characterisation. The feasibility of the fabrication technology has been demonstrated and all devices have operated satisfactorily, with a response showing good sensitivity and linearity. The multi-sensor has been developed for the detection of myocardial ischemia during cardiac surgery.