A nano initiator is developed by integrating Al/CuO-based nanoenergetic materials with a Au/Pt/Cr thin-film microheater realized onto a glass substrate. It is fabricated by using standard microsystem techniques that allow batch fabrication and high level of integration and reliability. The nano initiator is characterized by open-air combustion testing with an ignition success rate of 98%. The ejected combustion flame is seen clearly with a potential exceeding 2000 . The ignition power, ignition delay, and ignition energy are 1.16 W, 0.1-0.6 ms, and 0.12-0.70 mJ, respectively. The energy output is calculated to be around 60 mJ.