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Materials Research Society, Materials Research Society Symposium Proceedings, (1337), 2011

DOI: 10.1557/opl.2011.1029

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Lanthanum oxide capping layer for solution-processed ferroelectric-gate thin-film transistors

This paper is available in a repository.
This paper is available in a repository.

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Abstract

ABSTRACTWe report on the use of La2O3 (LO) as a capping layer for ferroelectric-gate thin-film transistors (FGTs) with solution-processed indium-tin-oxide (ITO) channel and Pb(Zr,Ti)O3 (PZT) gate insulator. The fabricated FGT exhibited excellent performance with a high “ON/OFF” current ratio (ION/IOFF) and a large memory window (∆Vth) of about 108 and 3.5 V, respectively. Additionally, a significantly improved data retention time (more than 16 hours) as compared to the ITO/PZT structure was also obtained as a result of good interface properties between the ITO channel and LO/PZT stacked gate insulator. We suggest that the LO capping layer acts as a barrier to prevent the interdiffusion and provides atomically flat ITO/LO/PZT interface. This all-oxide FGT device is very promising for future ferroelectric memories.