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The Electrochemical Society, ECS Journal of Solid State Science and Technology, 1(1), p. P11-P17

DOI: 10.1149/2.013201jss

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ZnO Etch-Feature Control via Concentration and Temperature of Various Acids

Journal article published in 2012 by Jorj I. Owen, Sascha E. Pust, Eerke Bunte, Jürgen Hupkes ORCID
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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Abstract

Separating the dependence of ZnO:Al thin-film texturization from deposition conditions is an important aspect for optimization of ZnO as light scattering, transparent contact in solar cells. The crater density and shape for a given polycrystalline ZnO: Al thin-film are shown to be controllable by altering the temperature and concentration of various acids. The crater densities generally increase with increasing temperature, decreasing concentration, or by etching in a weak acid with small molecular size. The etching trends observed for polycrystalline ZnO: Al films are confirmed on ZnO single crystals. We discuss in detail the etch process in terms of etch rates and crater formation statistics. Results are explained in accordance with a recently proposed ZnO etch model, and possible physical explanations are given.