Elsevier, Current Applied Physics, 3(12), p. 903-907, 2012
DOI: 10.1016/j.cap.2011.12.005
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0.85Bi0.5Na0.5TiO3–0.15Bi0.5K0.5TiO3 (BNKT15) lead-free thin films were prepared on Pt(111)/TiO2/SiO2/Si(100) substrates by the chemical solution deposition method. BNKT15 are MPB composition in the Bi0.5Na0.5TiO3–Bi0.5K0.5TiO3 (BNT–BKT) system. The maximum piezoelectric coefficient (d33,f) value of BNKT15 thin film is approximately 75 pm/V, which is comparable to that of polycrystalline PZT thin films. These results suggest that BNKT15 thin film can be used as an alternative for PZT films in piezoelectric micro-electromechanical systems.