2011 IEEE International Ultrasonics Symposium
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For three cuts of langasite with Euler angles (0°,138.5°,27°), (0°,22°,31°), and (0°,22°,90°) the temperature dependencies of SAW parameters – velocities, reflection coefficients and propagation loss were determined experimentally up to 800°C. For this, the test structures – delay lines and resonators, operating in the frequency range from 200 MHz up to 600 MHz, were designed and fabricated using Pt metallization. The influence of a passivation layer of Al 2 O 3 was investigated. The perspective for the use of the STW cut is discussed. SAW parameters; langasite; high temperature, STW