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Proceedings of the 2003 Bipolar/BiCMOS Circuits and Technology Meeting (IEEE Cat. No.03CH37440)

DOI: 10.1109/pac.2003.1289582

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Initial performance of a 6 GHz volume ECR ion source

This paper is available in a repository.
This paper is available in a repository.

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Data provided by SHERPA/RoMEO

Abstract

An all-permanent-magnet, 6-GHz "volume-type" ECR ion source has been constructed and evaluated. This source employs a novel magnetic field configuration with an extended central flat region to form a large, on-axis, ECR volume. It can also be converted to a traditional minimum-5 source where the ECR zones are surfaces. Comparisons are made of the performance of the source when operated in both "volume" and "surface" modes. According to the preliminary results, the "volume" mode is superior in terms of ion beam intensities and charge-state distributions.