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American Institute of Physics, Applied Physics Letters, 22(104), p. 222401

DOI: 10.1063/1.4880728

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In situ manufacture of magnetic tunnel junctions by a direct-write process

This paper is available in a repository.
This paper is available in a repository.

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Abstract

In situ construction of Co/SiO2/Co magnetic tunnel junctions using direct-write electron-beam-induced deposition is described. Proof-of-concept devices were built layer by layer depositing the specific components one at a time, allowing device manufacture using a strictly additive process. The devices exhibit a magnetic tunneling signature which agrees qualitatively with the Slonczewski model of magnetic tunneling.