Published in

Elsevier, Materials Science and Engineering: B, 3(20), p. 328-331

DOI: 10.1016/0921-5107(93)90249-m

Links

Tools

Export citation

Search in Google Scholar

Au and AuZn contacts on p-GaSb and the characteristics of the interfaces

This paper is available in a repository.
This paper is available in a repository.

Full text: Download

Green circle
Preprint: archiving allowed
Red circle
Postprint: archiving forbidden
Red circle
Published version: archiving forbidden
Data provided by SHERPA/RoMEO

Abstract

We analyse the specific contact resistance rho(C) and the interfacial microstructural characteristics (by Auger electron spectroscopy and X-ray diffraction) of Au and AuZn contacts on p-GaSb. The experiments showed that rho(C) hardly depends on the inclusion of Zn in the metallic film or on the annealing processes, at least for the carrier concentrations available (p greater-than-or-equal-to 1.6 x 10(17) cm-3). However, the dependence of rho(C) on the acceptor concentration leads us to conclude that field emission is the principal conduction mechanism, The efficacy of an Ar glow discharge in considerably reducing the oxide present at the GaSb substrate is demonstrated. We also show that rapid thermal annealing produces much thinner interface-reacted layers than does the conventional (resistive) heat treatment.