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Removal of carbon residuals from narrow spaces by RF discharges

Journal article published in 2008 by C. Stancu, A. C. Galca ORCID, G. Dinescu, C. Grisolia
This paper is available in a repository.
This paper is available in a repository.

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Preprint: policy unknown
Question mark in circle
Postprint: policy unknown
Question mark in circle
Published version: policy unknown