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2014 IEEE International Ultrasonics Symposium

DOI: 10.1109/ultsym.2014.0365

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Carbon nanotube forests as top electrodes for AlN-based electroacoustic resonators

Proceedings article published in 2014 by T. Mirea, J. Olivares, M. DeMiguel-Ramos ORCID, M. Clement, J. Sangrador, E. Iborra ORCID, S. Esconjauregui
This paper is available in a repository.
This paper is available in a repository.

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