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Elsevier, Procedia Engineering, (87), p. 827-830, 2014

DOI: 10.1016/j.proeng.2014.11.279

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Investigation of the Effects of Hydrodynamic and Parasitic Electrostatic Forces on the Dynamics of a High Aspect Ratio MEMS Accelerometer

This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Abstract

We present the results of an extensive characterization of physical and electrostatic effects influencing the dynamical behavior of a micro-electromechanical (MEMS) accelerometer based on commercial technology. A similar device has been utilized recently to demonstrate the effect of Casimir and other nano-scale interactions on the pull-in distance [Ardito et. al., Microelectron. Reliab., 52 (2012) 271]. In the present work, we focus on the influence of pressure, plate separation, and electric surface potentials on the spectral mechanical response. We finally find evidence for the presence of non-viscous damping due to compressibility of the ambient gas, and demonstrate a strong dependence of the sensitivity on the parameters of the operating point.