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American Institute of Physics, Applied Physics Letters, 22(105), p. 223304

DOI: 10.1063/1.4903499

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ZnO:H indium-free transparent conductive electrodes for active-matrix display applications

Journal article published in 2014 by Shuming Chen ORCID, Sisi Wang ORCID
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Abstract

Transparent conductive electrodes based on hydrogen (H)-doped zinc oxide (ZnO) have been proposed for active-matrix (AM) display applications. When fabricated with optimal H plasma power and optimal plasma treatment time, the resulting ZnO:H films exhibit low sheet resistance of 200 Ω/◻ and high average transmission of 85% at a film thickness of 150 nm. The demonstrated transparent conductive ZnO:H films can potentially replace indium-tin-oxide and serve as pixel electrodes for organic light-emitting diodes as well as source/drain electrodes for ZnO-based thin-film transistors. Use of the proposed ZnO:H electrodes means that two photomask stages can be removed from the fabrication process flow for ZnO-based AM backplanes.