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Elsevier, Ultramicroscopy, (154), p. 15-28, 2015

DOI: 10.1016/j.ultramic.2015.01.004

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Scanning electron microscope measurement of width and shape of 10 nm patterned lines using a JMONSEL-modeled library

Journal article published in 2015 by J. S. Villarrubia, A. E. Vladár, B. Ming, R. J. Kline, D. F. Sunday ORCID, J. S. Chawla, S. List
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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