Elsevier, Superlattices and Microstructures, (85), p. 101-111, 2015
DOI: 10.1016/j.spmi.2015.05.013
IOP Publishing, Journal of Physics: Conference Series, (700), p. 012048, 2016
DOI: 10.1088/1742-6596/700/1/012048
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This work presents a sol-gel approach for ZnO:Al films deposition. The effect of Al component and annealing treatments (from 500 to 800°C) on the film structural and optical properties has been studied. Sol-gel ZnO and Al2O3 films are used for comparative analyses. Structural evolution as a function of annealing temperatures is investigated by using X-Ray diffraction (XRD). XRD analysis of ZnO:Al films revealed that the predominant crystal phase is a wurtzite ZnO. It can be seen that the addition of Al leads to decaying of the film crystallinity. Fourier Transform Infrared (FTIR) and UV-VIS spectrophotometry are applied for characterization of the vibrational and optical properties. The Al component influences the shapes of the absorption bands. The optical properties of the sol-gel ZnO, ZnO:Al and Al2O3 films reveal very interesting features. Increasing Al component results in significantly higher film transparency.