Published in

Elsevier, Superlattices and Microstructures, (85), p. 101-111, 2015

DOI: 10.1016/j.spmi.2015.05.013

IOP Publishing, Journal of Physics: Conference Series, (700), p. 012048, 2016

DOI: 10.1088/1742-6596/700/1/012048

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Optical characterization of sol–gel ZnO:Al thin films

Journal article published in 2015 by T. Ivanova, A. Harizanova, T. Koutzarova, B. Vertruyen ORCID
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Abstract

This work presents a sol-gel approach for ZnO:Al films deposition. The effect of Al component and annealing treatments (from 500 to 800°C) on the film structural and optical properties has been studied. Sol-gel ZnO and Al2O3 films are used for comparative analyses. Structural evolution as a function of annealing temperatures is investigated by using X-Ray diffraction (XRD). XRD analysis of ZnO:Al films revealed that the predominant crystal phase is a wurtzite ZnO. It can be seen that the addition of Al leads to decaying of the film crystallinity. Fourier Transform Infrared (FTIR) and UV-VIS spectrophotometry are applied for characterization of the vibrational and optical properties. The Al component influences the shapes of the absorption bands. The optical properties of the sol-gel ZnO, ZnO:Al and Al2O3 films reveal very interesting features. Increasing Al component results in significantly higher film transparency.