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Wiley, physica status solidi (RRL) - Rapid Research Letters, 2(6), p. 77-79, 2011

DOI: 10.1002/pssr.201105538

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Local piezoelectric response of ZnO nanoparticles embedded in a photosensitive polymer

Journal article published in 2011 by K. Prashanthi, H. Zhang ORCID, V. Ramgopal Rao, T. Thundat
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This paper is available in a repository.

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Abstract

Local piezoelectric properties of ZnO nanoparticles (NPs) embedded in a photo-epoxy polymer are investigated by piezoresponse force microscopy (PFM). Integrating ZnO NPs into a photosensitive SU-8 polymer matrix not only retains the highly desired piezoelectric properties of the ZnO, but also preserves photosensitivity and optical transparency of the SU-8 polymer. These results have strong implications for simple photolithography based low-cost fabrication of piezoelectric microelectromechanicalsystems (MEMS) and nanoelectromechanicalsystems (NEMS) in both sensing and energy harvesting applications. (© 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)