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Springer (part of Springer Nature), Applied Physics A: Materials Science and Processing, 3(79), p. 489-497

DOI: 10.1007/s00339-004-2566-5

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Laser-assisted deposition of thin films from photoexcited vapour phases

Journal article published in 2004 by O. Conde ORCID, A. J. Silvestre ORCID
This paper is available in a repository.
This paper is available in a repository.

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Abstract

Laser-assisted chemical vapour deposition (LCVD) has been extensively studied in the last two decades. A vast range of applications encompass various areas such as microelectronics, micromechanics, microelectromechanics and integrated optics, and a variety of metals, semiconductors and insulators have been grown by LCVD. In this article, we review briefly the LCVD process and present two case studies of thin film deposition related to laser thermal excitation (e.g., boron carbide) and non-thermal excitation (e.g., CrO2) of the gas phase.