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2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)

DOI: 10.1109/transducers.2013.6626947

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Simplified monolithic process for fabricating low-cost, high-frequency, high-flatness scanning micromirrors

Proceedings article published in 2013 by B. W. Chui, T. Sun, R. Lim, D. U. S., M. Olivo ORCID, W. Sun
This paper is available in a repository.
This paper is available in a repository.

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Abstract

We have demonstrated a low-cost monolithic approach to fabricating micro-mirror platforms with tunable flatness for applications including Optical Coherence Tomography (OCT). This method enables flat, light-weight micro-mirrors with high resonance frequency to be made out of a single silicon-on-insulator (SOI) wafer, enabling a 10X improvement in mirror flatness over prior monolithic constructions. Using a single backside mask and etch, we take advantage of the aspect-ratio-dependent etch rate (ARDE) of deep reactive ion etching (DRIE) to simultaneously form both a support frame and a two-axis scanning micro-mirror. The mirror has a diameter of 1mm, while the thicknesses of the frame and the mirror (which has a conical backside profile) are 500μm and ~100μm, respectively.