Dissemin is shutting down on January 1st, 2025

Published in

Elsevier, Sensors and Actuators B: Chemical, 2(114), p. 826-835

DOI: 10.1016/j.snb.2005.07.057

Links

Tools

Export citation

Search in Google Scholar

High-temperature low-power performing micromachined suspended micro-hotplate for gas sensing applications

This paper is available in a repository.
This paper is available in a repository.

Full text: Download

Green circle
Preprint: archiving allowed
Red circle
Postprint: archiving forbidden
Red circle
Published version: archiving forbidden
Data provided by SHERPA/RoMEO

Abstract

Micromachined gas sensors that work at high temperatures, namely 700 °C or more, are necessary for some specific applications but they present a thermal cross-talk when they are integrated with other micromachined devices. In this paper we describe the fabrication steps and the implementation of a suspended micro-hotplate device for high temperature gas sensing applications, which presents a very low-power consumption. Simulations with the finite element model tool show that its integration with other micromachined devices is appropriate. The sensor device has been tested with BaSnO3 under oxygen and CO atmospheres.