Elsevier, Sensors and Actuators B: Chemical, 2(114), p. 826-835
DOI: 10.1016/j.snb.2005.07.057
Full text: Download
Micromachined gas sensors that work at high temperatures, namely 700 °C or more, are necessary for some specific applications but they present a thermal cross-talk when they are integrated with other micromachined devices. In this paper we describe the fabrication steps and the implementation of a suspended micro-hotplate device for high temperature gas sensing applications, which presents a very low-power consumption. Simulations with the finite element model tool show that its integration with other micromachined devices is appropriate. The sensor device has been tested with BaSnO3 under oxygen and CO atmospheres.