Corrigendum to “Nanocrystallized tetragonal metastable ZrO2 thin films deposited by metal-organic chemical vapor deposition for 3D capacitors” [Thin Solid Films 519 (2011) 5638–5644]
Journal article published in 2012 by
M. Brunet,
H. Mahfoz Kotb,
H. Mahfoz Kotb,
L. Bouscayrol,
E. Scheid,
M. Andrieux,
C. Legros,
S. Schamm Chardon 
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