Published in

Hindawi, Scanning, 6(10), p. 227-238, 1988

DOI: 10.1002/sca.4950100604

Links

Tools

Export citation

Search in Google Scholar

Elemental imaging by electron energy loss microscopy

This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

Full text: Download

Green circle
Preprint: archiving allowed
Green circle
Postprint: archiving allowed
Green circle
Published version: archiving allowed
Data provided by SHERPA/RoMEO

Abstract

Electron energy loss analysis, whether by high resolution scanning electron microscopy, or fixed-beam parallel filtering, provides a tool which in elemental analysis and mapping has the spatial resolution of the electron microscope itself provided the concentration of the chosen element is sufficiently high. This resolution potential is at the same time responsible for the high sensitivity of detection of a very small number but highly localized atoms. Both characteristics owe their existence to the strong signal in the beam of the primary electrons that have ionized the atoms being alanyzed. Moreover, given the 1 μA beam of the thermionic cathode and high resolution parallel filtering, electron energy loss approaches are already capable of taking microanalysis away from the zero-dimensional single point to the two-dimensional image that has been the strength of electron microscopy. One can only anticipate the substantial increase in our understanding of chemistry localized at the near molecular level through this advance.