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American Institute of Physics, Journal of Applied Physics, 6(111), p. 064904

DOI: 10.1063/1.3695451

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Cleaning graphene using atomic force microscope

Journal article published in 2012 by Niclas Lindvall, Alexey Kalabukhov, August Yurgens ORCID
This paper is available in a repository.
This paper is available in a repository.

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Abstract

We mechanically clean graphene devices using an atomic force microscope (AFM). By scanning an AFM tip in contact mode in a broom-like way over the sample, resist residues are pushed away from the desired area. We obtain atomically flat graphene with a root mean square (rms) roughness as low as 0.12 nm after this procedure. The cleaning also results in a shift of the charge-neutrality point toward zero gate voltage, as well as an increase in charge carrier mobility. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.3695451]