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IOP Publishing, Journal of Micromechanics and Microengineering, 12(22), p. 125020

DOI: 10.1088/0960-1317/22/12/125020

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Feasibility study of a 3D vibration-driven electromagnetic MEMS energy harvester with multiple vibration modes

Journal article published in 2012 by Huicong Liu, Bo Woon Soon, Nan Wang, C. J. Tay, Chenggen Quan, Chengkuo Lee ORCID
This paper is available in a repository.
This paper is available in a repository.

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Abstract

A novel electromagnetic energy harvester (EH) with multiple vibration modes has been developed and characterized using three-dimensional (3D) excitation at different frequencies. The device consists of a movable circular-mass patterned with three sets of double-layer aluminum (Al) coils, a circular-ring system incorporating a magnet and a supporting beam. The 3D dynamic behavior and performance analysis of the device shows that the first vibration mode of 1285 Hz is an out-of-plane motion, while the second and third modes of 1470 and 1550 Hz, respectively, are in-plane at angles of 60° (240°) and 150° (330°) to the horizontal (x-) axis. For an excitation acceleration of 1 g, the maximum power density achieved are 0.444, 0.242 and 0.125 µW cm−3 at vibration modes of I, II and III, respectively. The experimental results are in good agreement with the simulation and indicate a good potential in the development of a 3D EH device.