L11 CoPt films were fabricated on glass substrate with Pt underlayer by alternate deposition of Co and Pt films. The effect of individual Co and Pt thickness, and the total CoPt film thickness on structural and magnetic properties were investigated. In this paper, the experiments were divided into two parts. In the first part, [(x)Co1/(x)Pt0.75]n films with varying Co and Pt films were deposited and overall film thickness was kept at 7 nm. In the second part, [(x)Co1/(x)Pt0.75]n films with different total thickness were deposited. In the first case, the coercivity ( (H_{mathrm {cbot }}) ), squareness ( (S_{mathrm {bot }}) ), and perpendicular magnetic anisotropy are found to deteriorate with increasing Co and Pt layer thickness due to longer diffusion length. In the second case, the higher (H_{mathrm {cbot }}) with value of 110 kA/m is obtained in [(x)Co1/(x)Pt0.75]n film, and increasing total thickness of film results in lower (H_{mathrm {cbot }}) . Therefore, it is demonstrated that the CoPt film sputtered by multilayer type with lower thicknesses of Co and Pt layer promotes the formation of L11 structure with excellent perpendicular magnetic properties.