Dissemin is shutting down on January 1st, 2025

Published in

Elsevier, Applied Surface Science, 3(258), p. 1267-1271

DOI: 10.1016/j.apsusc.2011.09.089

Links

Tools

Export citation

Search in Google Scholar

Structural and optical properties of GaN thin films grown on Al2O3 substrates by MOCVD at different reactor pressures

This paper is available in a repository.
This paper is available in a repository.

Full text: Download

Green circle
Preprint: archiving allowed
Red circle
Postprint: archiving forbidden
Red circle
Published version: archiving forbidden
Data provided by SHERPA/RoMEO

Abstract

GaN thin films grown by MOCVD on (0001) Al2O3 substrates at different growth pressures were characterized by field-emission scanning electron microscopy, atomic force microscopy, micro-Raman, and photoluminescence at room temperature. It was found that there is an optimum pressure of 76Torr at which the structural and optical properties of the GaN samples are superior. On the other hand samples grown at higher pressure exhibited hexagonal surface pits and surface spirals. The results showed that the growth pressure strongly influences the morphology, and significantly affects the structural and optical properties of the GaN epilayers.