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Nature Research, Scientific Reports, 1(5), 2015

DOI: 10.1038/srep09510

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Film bulk acoustic resonators integrated on arbitrary substrates using a polymer support layer

Journal article published in 2015 by Guohao H. Chen, Xinru R. Zhao, Xiaozhi Z. Wang, Hao Jin, Shijian J. Li, Shurong R. Dong, Aj J. Flewitt ORCID, Wi I. Milne, Jk K. Luo ORCID
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Abstract

AbstractThe film bulk acoustic resonator (FBAR) is a widely-used MEMS device which can be used as a filter, or as a gravimetric sensor for biochemical or physical sensing. Current device architectures require the use of an acoustic mirror or a freestanding membrane and are fabricated as discrete components. A new architecture is demonstrated which permits fabrication and integration of FBARs on arbitrary substrates. Wave confinement is achieved by fabricating the resonator on a polyimide support layer. Results show when the polymer thickness is greater than a critical value, d, the FBARs have similar performance to devices using alternative architectures. For ZnO FBARs operating at 1.3–2.2 GHz, d is ~9 μm and the devices have a Q-factor of 470, comparable to 493 for the membrane architecture devices. The polymer support makes the resonators insensitive to the underlying substrate. Yields over 95% have been achieved on roughened silicon, copper and glass.