This work reports the fabrication and characterization of lithium cobalt oxide films (LiCoO2) on flexible Kapton® substrate. LiCoO2 is commonly used as cathode of lithium microbatteries but needs an annealing of 700 °C, which is not compatible with most flexible substrates. LiCoO2 films were deposited by reactive RF sputtering followed by an annealing process at 400 °C for 1 h in vacuum and air atmospheres both in silicon and Kapton® substrates. Raman spectroscopy, X-ray diffraction patterns and scanning electron microscopy images were used to evaluate samples crystallinity and morphology. Films fabricated in Kapton® and silicon substrates were compared.