American Institute of Physics, Journal of Applied Physics, 10(104), p. 104310
DOI: 10.1063/1.3021158
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A correlation between bonding changes in silicon-rich silicon nitride films, subjected to high temperature annealing under N 2 ambient, and the formation of silicon nanocrystals is presented. The postannealing appearance of a shoulder between 1000 and 1100 cm -1 in the Fourier transform infrared (FTIR) spectra of silicon-rich silicon nitride films is attributed to a reordering in the films toward an increased SiN 4 bonding configuration resulting from the precipitation of silicon nanocrystals. The FTIR monitoring of bonding changes in these films allows for the indirect verification of silicon nanocrystal formation.