Springer Verlag, Journal of Low Temperature Physics, 5-6(176), p. 841-847
DOI: 10.1007/s10909-013-1068-2
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SuperSpec is a novel on-chip spectrometer we are developing for (sub)millimeter wavelength astronomy. Our approach utilizes a filterbank of moderate resolution (R ̃ 500{)} channels, coupled to lumped element kinetic inductance detectors (KIDs), all integrated onto a single silicon chip. The channels are half-wave resonators formed by lithographically depositing segments of superconducting transmission line, and the KIDs are titanium nitride resonators. Here we present optical measurements of a first generation prototype, operating in the 180-280 GHz frequency range. We have used a coherent source to measure the spectral profiles of 17 channels, which achieve linewidths corresponding to quality factors as high as Q_{filt} = 700{,} consistent with the designed values plus additional dissipation characterized by Q_i ≈ 1440{.} We have also used a Fourier Transform Spectrometer to characterize the spectral purity of all 72 channels on the chip, and measure typical out of band responses {̃ }30 dB below the peak response.