Published in
MAIK Nauka/Interperiodica, Semiconductors, 6(43), p. 828-831
DOI: 10.1134/s106378260906027x
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Low-temperature plasma pulsed deposition of thin films with nanoscale periodicity of properties
Journal article published in 2009 by
A. A. Serdobintsev,
A. G. Veselov,
O. A. Kiryasova,
S. A. Portnov,
D. N. Bratashov 
This paper is available in a repository.
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