Published in
Springer, Applied Physics A: Materials Science and Processing, 3(82), p. 543-547, 2005
DOI: 10.1007/s00339-005-3379-x
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Effects of implantation defects on the carrier concentration of 6H-SiC
Journal article published in 2005 by
A. Ruggiero,
S. Libertino 
,
F. Roccaforte,
F. La Via,
L. Calcagno
,
F. Roccaforte,
F. La Via,
L. Calcagno
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