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Elsevier, Vacuum, (107), p. 259-263

DOI: 10.1016/j.vacuum.2014.02.020

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Alumina particle reinforced TiO2 composite films grown by direct liquid injection MOCVD

Journal article published in 2014 by L. Avril, J. Boudon ORCID, M. C. Marco de Lucas, L. Imhoff
This paper is available in a repository.
This paper is available in a repository.

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Abstract

The use of a liquid injection delivery system to form composite films containing nanoparticles was investigated. Al2O3–TiO2 films were grown on silicon substrates by direct liquid injection MOCVD (DLI-MOCVD) at 400 °C. The α-Al2O3 nanoparticles (α-Al2O3NPs) dispersed in TiO2 films resulted from co-deposition using colloidal α-Al2O3 solution and titanium tetraisopropoxide as titanium precursor. Scanning electron microscopy coupled with EDS as well as Raman spectroscopy confirmed the presence of α-Al2O3NPs aggregates embedded in the TiO2 matrix. The liquid injection system coupled with CVD technique can be promising to form composite films containing preformed nanoparticles.