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American Institute of Physics, Journal of Applied Physics, 16(114), p. 163706

DOI: 10.1063/1.4827190

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Scaling performance of Ga2O3/GaN nanowire field effect transistor

Journal article published in 2013 by Chi-Kang Li, Po-Chun Yeh, Jeng-Wei Yu, Lung-Han Peng, Yuh-Renn Wu ORCID
This paper is available in a repository.
This paper is available in a repository.

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Abstract

A three-dimensional finite element solver is applied to investigate the performance of Ga2O3/GaN nanowire transistors. Experimental nanowire results of 50 nm gate length are provided to compare with the simulation, and they show good agreement. The performance of a shorter gate length (<50 nm) is studied and scaling issues of the short-channel effect are analyzed. With a better surrounding gate design and a recessed gate approach, the optimal conditions for a 20 nm gate length are explored in this paper.