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Institute of Electrical and Electronics Engineers, IEEE Transactions on Device and Materials Reliability, 2(8), p. 272-276, 2008

DOI: 10.1109/tdmr.2007.915005

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Aging and Stability of GaN High Electron Mobility Transistors and Light-Emitting Diodes With $\hbox{TiB}_{2}$- and Ir-Based Contacts

This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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Abstract

There is interest in developing more stable contacts to a variety of GaN-based devices. In this paper, we give two examples of devices that show improved thermal stability when boride or Ir diffusion barriers are employed in ohmic-contact stacks. AlGaN/GaN high electron mobility transistors (HEMTs) were fabricated with Ti/Al/X/Ti/Au source-drain ohmic (where X is or Ir) contacts and were subjected to long-term annealing at 350 . By comparison with companion devices with conventional Ti/Al/Ni/Au ohmic contacts, the HEMTs with boride-based ohmic metal showed superior stability of both source-drain current and transconductance after 25 days of aging at 350 . The gate current for standard HEMTs increases during aging, and the standard ohmic contacts eventually fail by shorting to the gate contact. Similarly, InGaN/GaN multiple quantum well light-emitting diodes (MQW-LEDs) were fabricated with either Ni/Au//Ti/Au or Ni/Au/Ir/Au p-ohmic contacts. Both of these contacts showed superior long-term thermal stability compared to LEDs with conventional Ni/Au contacts.