The structure and chemical composition of ZnSe/Ga1−xMnxAs/ZnSe multilayers grown on (100) GaAs substrates are investigated by high-resolution transmission electron microscopy imaging and spectroscopy techniques. While all layers grow epitaxially and the Ga1−xMnxAs layer is free of planar defects, a high density of stacking faults is observed in the ZnSe layer over Ga1−xMnxAs. The composition of the ferromagnetic layer is measured to be Ga0.93Mn0.07As, and the Mn valence was determined to be 2+. Compositional profiles across the interfaces quantified by electron energy-loss spectroscopy show that the ZnSe/Ga1−xMnxAs interfaces are wider than the ZnSe/GaAs–substrate interface, which is mainly attributed to interfacial roughness. © 2003 American Institute of Physics.