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American Institute of Physics, Applied Physics Letters, 12(106), p. 124102

DOI: 10.1063/1.4916233

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Ion energies in high power impulse magnetron sputtering with and without localized ionization zones

Journal article published in 2015 by Yuchen Yang ORCID, Koichi Tanaka ORCID, Jason Liu ORCID, Andre Anders ORCID
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Abstract

High speed imaging of high power impulse magnetron sputtering (HiPIMS) discharges has revealed that ionization is localized in moving ionization zones but localization disappears at high currents for high yield targets. This offers an opportunity to study the effect ionization zones have on ion energies. We measure that ions have generally higher energies when ionization zones are present, supporting the concept that these zones are associated with moving potential humps. We propose that the disappearance of ionization zones is caused by an increased supply of atoms from the target which cools electrons and reduces depletion of atoms to be ionized.